Ion microanalyzer

Details Ion microanalyzer Ion microanalyzer

1974-06-07

1976-10-12

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

250309, H01J 3726

Patent

active

039860256

ABSTRACT:
In an ion microanalyzer wherein the secondary ions emitted from a sample as a result of the bombardment of the sample by a primary ion beam are mass-analyzed and selected in accordance with their mass to electric charge ratios and the selected secondary ions are then detected by a detector, the image of the secondary ions emitted from the sample is formed through the converging action of a modified electrostatic lens on a slit disposed between the mass analyzing means and the detector or in front of the mass analyzing means.

REFERENCES:
patent: 3517191 (1970-06-01), Liebl
patent: 3585383 (1971-06-01), Castaing
patent: 3686499 (1972-08-01), Omura
patent: 3840743 (1974-10-01), Tamura
"Ion Microprobe Mass Analyzer," Liebl, Journal of Applied Physics, vol. 38, No. 13, Dec. '67, pp. 5277-5283.

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