Ion implanters

Details Ion implanters Ion implanters

2008-01-02

2010-10-05

Nguyen, Kiet T (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S397000

Reexamination Certificate

active

07807984

ABSTRACT:
Components in an ion implanter that may see incidence of the ion beam include a chamber having an elongate slot opening defined by edges so that a central portion of the ion beam enters the component through the opening with the edges clipping at least a peripheral portion of the ion beam. The arrangement mitigates the problem of sputtered material escaping back out from the component and becoming entrained in the ion beam.

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J. Opitz-Coutureau et al., “Biber—The Berlin Ion Beam Exposure and Research Facility” inProceedings of RADECS 2003: Radiation and Its Effects on Components and Systems, Noordwijk, Netherlands, Sep. 15-19, 2003.

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