Ion implanter end processing station

Details Ion implanter end processing station Ion implanter end processing station

1981-09-08

1983-09-20

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

2504421, 2504922, G21K 508, G21K 510, H01J 3718, H01J 3720

Patent

active

044058640

ABSTRACT:
A novel end processing station having a carousel chamber that closely follows the configuration of the carousel to reduce the volume within the chamber to be pumped down.

REFERENCES:
patent: 4033904 (1977-07-01), Gerlach et al.
patent: 4035655 (1977-07-01), Guernet et al.
patent: 4044266 (1977-08-01), Jespersen et al.

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