Ion implanter

Details Ion implanter Ion implanter

1980-01-17

1981-06-16

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250492B, 250521, G21K 510

Patent

active

042740045

ABSTRACT:
The present invention relates to an ion implanter which is so constructed that specimens placed in the specimen chamber are caused to move so that ions supplied from an ion source are homogeneously implanted into the surfaces of the specimens, wherein said specimen chamber is so constructed that the whole mechanism which transmits the motion for moving the specimens is surrounded by space which is different from space which includes the specimens.

REFERENCES:
patent: 3727051 (1973-04-01), Stockbridge
patent: 3745341 (1973-07-01), Sakitani
patent: 3778621 (1973-12-01), Mikajiri
patent: 3823321 (1974-07-01), Rauch

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