Ion implantation with a collimator magnet and a neutral...

Details Ion implantation with a collimator magnet and a neutral... Ion implantation with a collimator magnet and a neutral...

2006-12-22

2009-08-25

Wells, Nikita (Department: 2881)

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

C250S492210, C250S492300, C250S3960ML, C335S210000

Reexamination Certificate

active

07579602

ABSTRACT:
This disclosure describes an ion implanter having a collimator magnet that is configured to shape an ion beam. A first deceleration stage is configured to manipulate energy of the ion beam shaped by the collimator magnet. A neutral filter magnet is configured to filter neutral atoms from the ion beam passing through the first deceleration stage.

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patent: 0473097 (1992-03-01), None
SHX, SEN Corporation, Jun. 2005, web site: www.senova.co.jp/english/product/hicurre/shx.html.
Kikuchi et al., “Profile and Angle Measurement System of SHX”, SEN Corporation, 2006, pp. 393-396, American Institute of Physics, Japan.

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