Radiant energy – Electron energy analysis
Patent
1995-03-23
1996-10-15
Berman, Jack I.
Radiant energy
Electron energy analysis
250397, H01J 4948
Patent
active
055656811
ABSTRACT:
An ion energy analyzer having a micro-channel plate where the geometric filtering characteristics of the micro-channel plate are electrically controlled. The ion energy analyzer contains a metallic collector, a control grid and a micro-channel plate, all formed into a cylindrical stack where the collector, control grid and micro-channel plate are separated by ceramic insulating washers. A control element is formed within each aperture of the micro-channel plate for controlling a critical angle of each aperture. A voltage is applied to the control element such that an electric field is generated within each micro-channel. By varying the magnitude of the electric field, the critical angle of the micro-channel plate can be electrically controlled, and as such, certain ion trajectories can be selected for entry into the ion energy analyzer.
REFERENCES:
patent: 5280176 (1994-01-01), Jach et al.
patent: 5451784 (1995-09-01), Loewenhardt et al.
Stenzel et al., "Novel Directional Ion Energy Analyzer", Rev. Sci. Instrum. 53(7), Jul. 1982, pp. 1027-1031.
Liu et al., "Ion Bombardment in RF Plasmas", J. Appl. Phys. 68(8), 15 Oct. 1990, pp. 3916-3934.
Loewenhardt Peter
Yin Gerald Z.
Applied Materials Inc.
Berman Jack I.
Nguyen Kiet T.
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