Ion-electron analyzer

Details Ion-electron analyzer Ion-electron analyzer

1979-02-01

1980-11-11

Dixon, Harold A.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250492R, G01M 2300

Patent

active

042335094

ABSTRACT:
An ion-electron analyzer consists of an ion microprobe analyzer and an electron diffractometer which are accommodated in a single housing, an ion gun extracts an electron beam and a negative ion beam simultaneously from the same source of charged particles and simultaneously bombards these beams onto a selected location on the surface of a specimen.

REFERENCES:
patent: 3617739 (1971-11-01), Liebl
patent: 4139774 (1979-02-01), Katagiri
"Design & Performance of an Electron Diffraction Camera" by J. E. Ruedy.

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