Ion charge neutralization for electron beam devices

Details Ion charge neutralization for electron beam devices Ion charge neutralization for electron beam devices

1978-08-04

1981-02-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250311, 250310, G01N 2300

Patent

active

042490774

ABSTRACT:
An electron beam device in which an electron beam swept over a target causes the buildup of negative charges on the surface of said targets. The negative charges are neutralized by low-kinetic-energy positive ions emitted by an ion source whose output exceeds the number of ions necessary to neutralize the negative charges.

REFERENCES:
patent: 2890342 (1959-06-01), Columbe
patent: 3219817 (1965-11-01), Mollenstedt
patent: 3665185 (1972-05-01), Goff
patent: 4052614 (1977-10-01), Grunthaner et al.

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