Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate
2005-07-05
2005-07-05
Lee, John R. (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Methods
C250S306000, C250S309000, C250S492100, C250S492200, C250S492210
Reexamination Certificate
active
06914244
ABSTRACT:
An ion beam milling system and method for electron microscopy specimen preparation is provided and is useful for the preparation for analysis by either TEM or SEM of semiconductors, metals, alloys, ceramics, and other inorganic materials. In one embodiment, a system and process are provided for the preparation of specimens for analysis by transmission electron microscopy including a specimen processing chamber, at least two ion beam generators, and a specimen support or holder. An ion beam masking member is secured to a surface of the specimen and the specimen is milled. Preferably, the system also includes the ability to view the progress of the milling operation and may include an imaging device such as a light microscope which permits monitoring of the area of interest on a specimen as the specimen is milled.
REFERENCES:
patent: 4128765 (1978-12-01), Franks
patent: 4272682 (1981-06-01), Swann
patent: 5009743 (1991-04-01), Swann
patent: 5472566 (1995-12-01), Swann et al.
patent: 5708267 (1998-01-01), Hatakeyama
patent: 5753924 (1998-05-01), Swann
patent: 5907157 (1999-05-01), Yoshioka et al.
patent: 5922179 (1999-07-01), Mitro et al.
patent: 5940678 (1999-08-01), Doong et al.
patent: 5986264 (1999-11-01), Grunewald
patent: 6194720 (2001-02-01), Li et al.
patent: 6768110 (2004-07-01), Alani
patent: 6784427 (2004-08-01), Grunewald et al.
patent: 139 670 (1980-01-01), None
Kawasaki, M. et al., “A new Specimen Preparation Method for Cross-Section TEM Using Diamond Powders” Journal of Electron Microscopy, Japanese Society for Electron Microscopy, Tokyo, JP, vol. 48, No. 2, 1999, pp. 131-137.
Langer, Elektronoenptische Untersuchung des Werkstoffverhaltens in mechanisch belasteten Mikrobauteilen, Dec. 13, 1996, pp. 56-60.
Senz et al., Optimisation of the wire-shadow TEM cross-section preparation technique, Ultramicroscopy 70 (1997) 23-28.
Alani et al., An updated Gas Source Focused Ion Beam Instrument for TEM Specimen Preparation, Mat. Res. Soc. Symp. Proc. vol. 254, 1992 Materials Research Society, pp. 65-78.
Brochure, FB-2000A Focused ION Beam System, Hitachi, pp. 1-5.
Alani et al., An Updated Ion Polishing System for TEM Specimen Preparation of Materials, Mat. Res. Soc. Symp. Proc. vol. 480, 1997 Materials Research Society, pps. 263-292.
Brochure, Model 645 PIMS Precision Ion Milling System, Gatan.
L. Berthold and E. Langer, TEM-Cross Section Preparation Using Wire Shadowing.
Internet document, Ion Milling with RES 100, BAL-TEC.
Brochure, Model 691 Precision Ion Polishing System (PIPS), Gatan.
Internet document, Alani et al., Recent Advances in Broad Ion Beam Techniques: Instrumentation for SEM Specimen Preparation of Semiconductors, Cahners,Semiconductor International.
Dinsmore & Shohl LLP
Ropintassco Holdings, L.P.
Smith II Johnnie L
LandOfFree
Ion beam milling system and method for electron microscopy... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ion beam milling system and method for electron microscopy..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ion beam milling system and method for electron microscopy... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3432916