Ion beam machining techniques and apparatus

Details Ion beam machining techniques and apparatus Ion beam machining techniques and apparatus

1976-10-29

1978-12-05

Smith, Alfred E.

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

250398, 250491, G21K 506

Patent

active

041287657

ABSTRACT:
Method for producing specimens suitable for examination by electron microscopy techniques in accordance with which at least one ion beam from an ion source is directed onto a specimen while effecting relative rotation between the ion source(s) and the specimen and simultaneously varying the angle of incidence of ion beam(s) whereby the angle of incidence of the ion beam(s) on the specimen is varied in a random manner. The ion source(s) may remain stationary while rotating and rocking the specimen or the ion source(s) may be rocked and the specimen rotated and rocked or the specimen may remain stationary while rocking and rotating the ion source(s) or both the source(s) and the specimen may be rotated and rocked. In apparatus for carrying out the method of the invention there is provided specimen support means and means for rotating same, at least one ion source adapted to direct at least one ion beam onto the specimen and means for varying the angle of incidence of the ion beam(s) on the surface of the specimen.

REFERENCES:
patent: 3629577 (1971-12-01), Weber et al.
patent: 3719776 (1973-03-01), Fujiyas et al.
patent: 3757118 (1973-09-01), Hodge et al.

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