Ion beam generating apparatus

Details Ion beam generating apparatus Ion beam generating apparatus

1984-09-04

1987-01-20

Moore, David K.

Electric lamp and discharge devices

With positive or negative ion acceleration

3133621, H05H 2900

Patent

active

046382097

ABSTRACT:
An ion beam generating apparatus is used together with a vacuum chamber. The ion beam generating apparatus has an anode assembly arranged inside the vacuum chamber, a gas supply mechanism for supplying a gas into the vicinity of the anode assembly, a temperature control mechanism for controlling a temperature of an apex of the anode assembly, and a cooling mechanism for cooling at least part of the anode assembly.

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"Gas Ion Sources for Micropatterning", Takashi Horiuchi et al. Japan Society For Promotion of Science, 1982.
"Liquid Metal Source of Gold Ions", P. D. Prewett et al., Rev. Sci. Instrum., 1981, Am. Inst. Physics.

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