Ion beam device and ion beam processing method, and holder...

Details Ion beam device and ion beam processing method, and holder... Ion beam device and ion beam processing method, and holder...

2007-11-20

2007-11-20

Berman, Jack I. (Department: 2881)

Radiant energy

Methods including separation or nonradiant treatment of test...

C250S311000, C250S307000, C250S442110

Reexamination Certificate

active

10520982

ABSTRACT:
An apparatus has a holder member (21) which holds a sample (3), and a removing beam source (13) which irradiates an inert ion beam onto a cross section (4) of the sample (3) held by a holder member (21) and removes a fracture layer on the cross section (4). Then, the removing beam source (13) is disposed on the holding end side of the sample (3) with respect to the normal L of the cross section (4) so that the irradiating direction of the inert ion beam is tilted at the tilt angle θ to the normal L with respect to the cross section (4).

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