Ion beam apparatus, ion beam processing method and sample...

Details Ion beam apparatus, ion beam processing method and sample... Ion beam apparatus, ion beam processing method and sample...

2005-01-04

2005-01-04

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S442110

Reexamination Certificate

active

06838685

ABSTRACT:
An ion beam processing device has a sample holder for fixing a sample on which a section has been formed by irradiation of a specified focused ion beam from a surface side, and gas ion beam irradiation device for irradiating a gas ion beam to a region of the sample fixing using the holder member that contains the section to remove a damage layer on the section. The gas ion beam from the gas ion beam irradiation device irradiates the section from a rear surface side of the sample at a specified incident angle.

REFERENCES:
patent: 5986264 (1999-11-01), Grunewald

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