Radiant energy – Irradiation of objects or material
Reexamination Certificate
2007-03-29
2010-02-02
Souw, Bernard E (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492300, C250S515100, C315S111110, C315S111810, C315S111910
Reexamination Certificate
active
07655928
ABSTRACT:
Ion accelerating devices including connection mechanisms with integrated shielding electrode and related methods are disclosed. According to an embodiment, an ion accelerating device of an ion implantation system comprises: a first element; a first connection system within the first element, the first connection system including a first connector and a first encapsulated shielding electrode around the first connector; and a second connection system within a second element other than the first element, the second connection system being coupled to the first connector; wherein the first encapsulated shielding electrode includes a first shielding portion adjacent to a first interface surface of the first element where the second connection system interfaces with the first element, in a cross-sectional view, the first shielding portion being substantially U-shaped.
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Souw Bernard E
Varian Semiconductor Equipment Associates Inc.
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