Introducing nanotubes in trenches and structures formed thereby

Details Introducing nanotubes in trenches and structures formed thereby Introducing nanotubes in trenches and structures formed thereby

2004-12-29

2010-02-23

Parker, Frederick J (Department: 1792)

Coating processes

Frictional application

C427S475000, C977S720000

Reexamination Certificate

active

07666465

ABSTRACT:
Methods of forming a microelectronic structure are described. Embodiments of those methods include providing a substrate comprising at least one opening, and then applying a nanotube slurry comprising at least one nanotube to the substrate, wherein the at least one nanotube is substantially placed within the at least one opening.

REFERENCES:
patent: 6887450 (2005-05-01), Chen et al.
patent: 2006/0123628 (2006-06-01), Horiuchi et al.
patent: 2006/0138658 (2006-06-01), Ravi et al.

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