Interlock apparatus and method for supplying gas to a...

Details Interlock apparatus and method for supplying gas to a... Interlock apparatus and method for supplying gas to a...

2007-01-02

2007-01-02

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Mechanical control system

C251S129150, C118S663000, C438S005000, C324S546000

Reexamination Certificate

active

10687370

ABSTRACT:
A gas supplying apparatus for a semiconductor manufacturing device has an interlock apparatus that includes at least one solenoid valve that controls the gas supply from a gas source to the semiconductor manufacturing device, a main controller configured to ouput a control signal for the semiconductor manufacturing device and a driver signal, a driver configured to apply a driving voltage to the at least one solenoid valve in response to the driver signal, and an interlocker configured to sense the open/shut state of the solenoid valves and configured to transmit an interlock signal to the main controller.

REFERENCES:
patent: 5119683 (1992-06-01), Deutsch et al.
patent: 5433344 (1995-07-01), Fulton et al.
patent: 2000-161532 (2000-06-01), None

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