Interlayer connections for layered electronic devices

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S622000, C438S624000, C438S668000, C438S637000, C438S667000, C257S773000, C257S775000, C257S765000, C257S750000, C257S758000, C257S760000

Reexamination Certificate

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06979643

ABSTRACT:
In a method for forming interlayer connections, metal conducting paths in an overlaying layer and vias forming the deposit in one and the same operation. In an interlayer connection formed in this manner the vias are provided integral with connecting conducting paths in the overlaying layer.

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patent: 6600225 (2003-07-01), Tanaka
patent: 05160445 (1993-06-01), None

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