Interferometric temperature measurement system and method

Details Interferometric temperature measurement system and method Interferometric temperature measurement system and method

1992-04-27

1993-10-05

Cuchlinski, Jr., William A.

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

374120, 356 43, 356351, G01J 558, G01K 1100

Patent

active

052498654

ABSTRACT:
An interferonmetric temperature measurement system is described for determining the temperature of a sample. The system comprises three detectors for measuring various intensities of a beam of electromagnetic radiation reflected off the sample and circuitry for determining the temperature from the intensities. The detectors measure the intensity of the beam and two orthogonally polarized components of the beam.

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patent: 4707147 (1987-11-01), Aoki et al.
patent: 4970385 (1990-11-01), Tatsuno et al.
patent: 5011295 (1991-04-01), Krishnan et al.

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