Interferometric modulation pixels and manufacturing method...

Details Interferometric modulation pixels and manufacturing method... Interferometric modulation pixels and manufacturing method...

2005-10-04

2005-10-04

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000

Reexamination Certificate

active

06952303

ABSTRACT:
A protection layer covers the cavity-side surface of a bottom electrode of a interferometric modulation pixel. Consequently, the protective layer protects the surface of the bottom electrode while a sacrificial layer between the bottom electrode and the top electrode is being etched. Thus, the distance between the bottom electrode and the top electrode is maintained, thereby ensuring that only the light with desired wavelengths is reflected by the interferometric modulation pixel.

REFERENCES:
patent: 5835255 (1998-11-01), Miles
patent: 6016693 (2000-01-01), Viani et al.
patent: 6577785 (2003-06-01), Spahn et al.

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