Interferometric measurement of DLC layer on magnetic head

Details Interferometric measurement of DLC layer on magnetic head Interferometric measurement of DLC layer on magnetic head

2008-01-18

2010-10-05

Lee, Hwa S. A (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07808652

ABSTRACT:
An explicit relationship is developed between the ratio of average interferometric modulation produced by diamond-like carbon (DLC)-coated magnetic-head surfaces and the thickness of the DLC layer. Accordingly, the thickness of the DLC layer is calculated in various manners from modulation data acquired for the system using object surfaces of known optical parameters.

REFERENCES:
patent: 6404504 (2002-06-01), Liu et al.
patent: 7139081 (2006-11-01), De Groot

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