Optics: measuring and testing – Angle measuring or angular axial alignment – Automatic following or aligning while indicating measurement
Reexamination Certificate
2004-11-30
2009-12-08
Tarcza, Thomas H (Department: 3662)
Optics: measuring and testing
Angle measuring or angular axial alignment
Automatic following or aligning while indicating measurement
Reexamination Certificate
active
07630067
ABSTRACT:
The present invention features a method to determine relative spatial parameters between two coordinate systems, which may be a mold and a region of a substrate in which mold is employed to generate a pattern. The method includes sensing relative alignment between the two coordinate systems at multiple points and determines relative spatial parameters therebetween. The relative spatial parameters include a relative area and a relative shape.
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U.S. Appl. No. 11/292,402, naming Inventors Sreenivasan et al., entitled Methods of Exposure for the Purpose of Thermal Mana
Aghili Alireza
Babbs Daniel A.
Choi Byung-Jin
Nimmakayala Pawan Kumar
Rafferty Tom H.
Molecular Imprints, Inc.
Ratcliffe Luke D
Tarcza Thomas H
Wood Laura C.
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