Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2006-02-21
2006-02-21
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07002694
ABSTRACT:
An interferometer system comprises a reference surface, a support for an object providing an object surface, a radiation source for emitting radiation of an adjustable frequency onto the reference surface and the object surface, a position-sensitive radiation detector, a controller for adjusting a plurality of different frequencies of the radiation emitted by the radiation source, and an integrator for averaging the interference patterns superposed on the radiation detector at different frequencies. Moreover, there is provided a method for recording an interferogram, a method for providing an object with a target surface as well as a method for manufacturing an object with a target surface.
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Dörband Bernd
Kähler Wolfgang
Müller Henriette
Schulte Stefan
Carl Zeiss SMT AG
Day Jones
Turner Samuel A.
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