Interferometer, optical scanning type tunneling microscope and o

Details Interferometer, optical scanning type tunneling microscope and o Interferometer, optical scanning type tunneling microscope and o

1994-06-29

1996-04-16

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356359, 250234, 250216, G01B 902, H01J 314

Patent

active

055088058

ABSTRACT:
In an optical scanning type tunneling microscope, reference light is prepared in addition to light used to be projected to a sample, and this reference light and also light picked up from an optical probe are caused to interfere with each other. As a result, phase information of light about a region having a very smaller dimension than a wavelength of the light irradiated from alight source can be acquired.

REFERENCES:
patent: 4917462 (1990-04-01), Lewis et al.
patent: 5231501 (1994-06-01), Swanson et al.
patent: 5324935 (1994-06-01), Yasutake
patent: 5354985 (1994-10-01), Quate
patent: 5362963 (1994-11-01), Kopelman et al.

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