Interferometer apparatus and method of processing a...

Details Interferometer apparatus and method of processing a... Interferometer apparatus and method of processing a...

2007-10-30

2007-10-30

Lee, Hwa (Andrew) (Department: 2886)

Optics: measuring and testing

By light interference

Having polarization

C356S514000

Reexamination Certificate

active

10700315

ABSTRACT:
A method of processing a substrate having an optical surface includes using an interferometer which includes optics for providing a beam of measuring light. The optics polarize the beam of measuring light such that a tangential polarization component continuously increases relative to a radial polarization component with increasing distance from an optical axis. The substrate is positioned in the beam of measuring light. Using the system, the interferometer determines a surface map of the optical surface, and determines deviations of the optical surface from a target shape.

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