Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-05-24
2011-05-24
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07948636
ABSTRACT:
Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison.
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pat
Colonna de Lega Xavier
Darwin Michael J
de Groot Peter
Gallatin Gregg M.
Stoner Robert
Fish & Richardson P.C.
Lyons Michael A
Zygo Corporation
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