Interference measuring apparatus for detecting a plurality...

Details Interference measuring apparatus for detecting a plurality... Interference measuring apparatus for detecting a plurality...

2008-05-20

2008-05-20

Turner, Samuel A (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

Reexamination Certificate

active

07375820

ABSTRACT:
Interference measuring apparatus having an optical system for dividing a coherent light beam into two light beams, and causing the divided two light beams to pass along discrete optical paths. The light beams are made into linearly polarized light beams orthogonal to each other and given modulation to the phase of the wave front of at least one of them. The wave fronts of the linearly polarized light beams are superposed one upon the others. A light dividing member divides the light beams superposed one upon the other by the optical system into a plurality of light beams. A polarizing plate takes out each light beam with a 45° polarized component, and a plurality of light receiving elements individually receive the light beams taken out by the polarizing plate.

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