Interface apparatus for a stepper

Details Interface apparatus for a stepper Interface apparatus for a stepper

1996-10-16

1998-06-09

Powell, William

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

438 5, 438 10, H01L 2100

Patent

active

057627479

ABSTRACT:
An interface apparatus located between a chamber unit and a stepper main controller, which collectively constitute a stepper adapted to form a pattern film on a semiconductor substrate by using a photolithography process well-known in the art. The interface is adapted to detect and control abnormal operational states within the chamber unit via a main controller on the main stepper unit even if the main stepper unit and the chamber unit are made by different manufacturers.

REFERENCES:
patent: 4700311 (1987-10-01), Tributsch et al.
patent: 4767496 (1988-08-01), Hieber

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