Interdigitated, full wheatstone bridge flow sensor transducer

Measuring and testing – Volume or rate of flow – Thermal type

Reexamination Certificate

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Reexamination Certificate

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11366653

ABSTRACT:
A sensor apparatus includes a heating element comprising an upstream side and a downstream side. A first heat sensing set is generally configured adjacent to the upstream side of the heating element and comprises a first sensing element and a second sensing element, the first and second sensing elements configured in a serpentine, interdigitated pattern. A second heat sensing set can be configured adjacent to the downstream side of the heating element and comprises a third sensing element and a fourth sensing element, the third and fourth sensing elements configured in a serpentine, interdigitated pattern.

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patent: 6626037 (2003-09-01), Wado et al.
patent: 6675644 (2004-01-01), Yamakawa et al.
patent: 6889545 (2005-05-01), Nakada et al.
patent: 6923053 (2005-08-01), Yamada et al.
patent: 7010971 (2006-03-01), Matsumoto et al.

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