Interconnect structure of semiconductor integrated circuit,...

Computer-aided design and analysis of circuits and semiconductor – Integrated circuit design processing – Layout editor

Reexamination Certificate

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C716S126000, C716S129000

Reexamination Certificate

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07913221

ABSTRACT:
A method for designing an interconnect structure of an interconnect layer in a semiconductor integrated circuit device includes the steps of: (a) inputting layout data of the semiconductor integrated circuit device; (b) controlling an air gap exclusion area based interconnects in the layout data; and (c) outputting layout data including the air gap exclusion area determined in the step (b).

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