Interchangeable specimen trays and apparatus for a vacuum type t

Details Interchangeable specimen trays and apparatus for a vacuum type t Interchangeable specimen trays and apparatus for a vacuum type t

1975-12-24

1977-07-05

Smith, Alfred E.

Radiant energy

Means to align or position an object relative to a source or...

250141, 250442, G21K 506

Patent

active

040339041

ABSTRACT:
The vacuum chamber for an Auger analyzer is provided with a side access port through which interchangeable specimen trays are inserted and installed on a rotatable support structure. The specimen tray has a plurality of peripheral specimen sites and a Faraday cup probe structure similarly positioned but affixed to the support structure. The Faraday cup facilitates calibrating the ion beam and positioning the ion beam and the cup at the focal point of the electron beam. The support structure is subsequently rotated to sequentially expose each specimen to the beams.

REFERENCES:
patent: 2849619 (1958-08-01), Eisfeldt
patent: 3342992 (1967-09-01), Schmidt et al.
patent: 3374349 (1968-03-01), Macres
patent: 3400265 (1968-09-01), Houbart
patent: 3496359 (1970-02-01), Weinstock et al.
patent: 3629579 (1971-12-01), Naiton
patent: 3679900 (1972-07-01), Kimura
patent: 3689766 (1972-09-01), Freeman

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