Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-01-10
2006-01-10
Nguyen, Tu T. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
Reexamination Certificate
active
06985220
ABSTRACT:
A method of tuning an inspection system. An inspection piece is sensed and analyzed to identify anomalies. Level information is analyzed with an initial set of thresholds, and an initial portion of the anomalies are flagging as defects. The inspection system parameters are changed, and the level information is analyzed with a modified set of thresholds. The anomalies are flagged as defects based on the immediately preceding analysis of the level information. The steps of changing the thresholds and reflagging the defects are repeated as desired, and the modified set of thresholds are stored for use in an inspection system recipe.
REFERENCES:
patent: 6563114 (2003-05-01), Nagahama et al.
patent: 6833913 (2004-12-01), Wolf et al.
Bhagat Vivek
Chen Chien-Huei
Kulkarni Ashok V.
Quigley James A.
Song Qiang
KLA-Tencor Technologies Corporation
Luedeka Neely & Graham P.C.
Nguyen Tu T.
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