Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2003-11-07
2009-08-04
Shechtman, Sean P (Department: 2121)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S002000, C700S005000, C700S009000, C700S019000, C700S121000, C370S414000, C370S479000, C370S535000, C370S537000, C370S546000, C370S908000
Reexamination Certificate
active
07571017
ABSTRACT:
An Intelligent Data Multiplexer (“IDM”) can be used to interface a plurality of host computers with a semiconductor manufacturing tool. In one embodiment, the IDM has a plurality of host-side ports configured to receive messages from each of the host computers interfaced with the semiconductor manufacturing tool. The IDM also includes a multiplexer configured to multiplex the messages received from the host-side ports. To process possible conflict messages from the host computers, the IDM has a conflict resolve module. The messages are then delivered from the IDM to the semiconductor manufacturing tool through a tool-side port used to connect the semiconductor manufacturing tool to the IDM.
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Applied Materials Inc.
Fahmi Tarek N.
Shechtman Sean P
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