Supports: racks – Special article – Platelike
Patent
1996-05-28
1998-10-06
Gibson, Jr., Robert W.
Supports: racks
Special article
Platelike
206454, A47F 700
Patent
active
058164154
ABSTRACT:
The present invention provides a wafer cassette formed as an enclosed box in which a plurality of wafers may be stored and processed, and which has the capability of simultaneously serving as a wafer cassette box. The wafers are protected from contamination and damage by the enclosed box structure. An upper cover for the box structure is provided which is capable of being opened or closed while the side and bottom portions of the wafer cassette are permanently arranged in a closed position. The upper cover can be a slide type or swinging-door type structure, and the swinging-door type structure is hinge-coupled to at least one portion of the wafer cassette, preferably to at least one side portion. Thus, the total weight and volume of wafer transport and storage apparatus are reduced so that transport, storage and handling of the wafers is facilitated.
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patent: 5575394 (1996-11-01), Nyseth
Ahn Chung-sam
Hong Sa-mun
Gibson , Jr. Robert W.
Samsung Electronics Co,. Ltd.
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