Integrated substrate transfer module

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C324S754210

Reexamination Certificate

active

07919972

ABSTRACT:
A system and method for supporting and transferring a substrate relative to a plurality of testing columns are provided. The system includes a testing table adapted to support and move the substrate relative to the plurality of testing columns. The testing table may include an end effector disposed therein to transfer the substrate relative to an upper surface of the testing table. The method includes transferring the substrate to the testing table and moving the substrate relative to the plurality of testing columns. Signals indicative of electronic device performance are sensed to determine operability of the devices on the substrate.

REFERENCES:
patent: 3983401 (1976-09-01), Livesay
patent: 4090056 (1978-05-01), Lockwood et al.
patent: 4362945 (1982-12-01), Riecke et al.
patent: 4437044 (1984-03-01), Veith et al.
patent: 4495966 (1985-01-01), Longamore
patent: 4528452 (1985-07-01), Livesay
patent: 4532423 (1985-07-01), Tojo et al.
patent: 4684808 (1987-08-01), Plies et al.
patent: 4725736 (1988-02-01), Crewe
patent: 4740705 (1988-04-01), Crewe
patent: 4760567 (1988-07-01), Crewe
patent: 4761607 (1988-08-01), Shiragasawa et al.
patent: 4764818 (1988-08-01), Crew
patent: 4795912 (1989-01-01), Maschke
patent: 4818933 (1989-04-01), Kerschner et al.
patent: 4819038 (1989-04-01), Alt
patent: 4843312 (1989-06-01), Hartman et al.
patent: 4862075 (1989-08-01), Choi et al.
patent: 4870357 (1989-09-01), Young et al.
patent: 4899105 (1990-02-01), Akiyama et al.
patent: 4965515 (1990-10-01), Karasawa et al.
patent: 4983833 (1991-01-01), Brunner et al.
patent: 4985676 (1991-01-01), Karasawa et al.
patent: 4985681 (1991-01-01), Brunner et al.
patent: 5081687 (1992-01-01), Henley et al.
patent: 5124635 (1992-06-01), Henley
patent: 5170127 (1992-12-01), Henley
patent: 5175495 (1992-12-01), Brahme et al.
patent: 5177437 (1993-01-01), Henley
patent: 5258706 (1993-11-01), Brunner et al.
patent: 5268638 (1993-12-01), Brunner et al.
patent: 5278494 (1994-01-01), Obigane et al.
patent: 5285150 (1994-02-01), Henley et al.
patent: 5313156 (1994-05-01), Klug et al.
patent: 5368676 (1994-11-01), Nagaseki et al.
patent: 5369359 (1994-11-01), Schmitt et al.
patent: 5371459 (1994-12-01), Brunner et al.
patent: 5414374 (1995-05-01), Brunner et al.
patent: 5430292 (1995-07-01), Honjo et al.
patent: 5432461 (1995-07-01), Henley
patent: 5504438 (1996-04-01), Henley
patent: 5528158 (1996-06-01), Sinsheimer et al.
patent: 5530370 (1996-06-01), Langhof et al.
patent: 5558717 (1996-09-01), Zhao et al.
patent: 5621333 (1997-04-01), Long et al.
patent: 5644245 (1997-07-01), Saitoh et al.
patent: 5657139 (1997-08-01), Hayashi et al.
patent: 5691764 (1997-11-01), Takekoshi et al.
patent: 5742173 (1998-04-01), Nakagomi et al.
patent: 5774100 (1998-06-01), Aoki et al.
patent: 5801545 (1998-09-01), Takekoshi et al.
patent: 5801764 (1998-09-01), Koizumi et al.
patent: 5834007 (1998-11-01), Kubota et al.
patent: 5834773 (1998-11-01), Brunner et al.
patent: 5892224 (1999-04-01), Nakasuji et al.
patent: 5923180 (1999-07-01), Botka et al.
patent: 5930607 (1999-07-01), Satou et al.
patent: 5936687 (1999-08-01), Lee et al.
patent: 5973323 (1999-10-01), Adler et al.
patent: 5982190 (1999-11-01), Toro-Lira
patent: 6033281 (2000-03-01), Toro-Lira
patent: 6046599 (2000-04-01), Long et al.
patent: 6075245 (2000-06-01), Toro-Lira
patent: 6086362 (2000-07-01), White et al.
patent: 6137303 (2000-10-01), Deckert et al.
patent: 6145648 (2000-11-01), Teichman et al.
patent: 6198299 (2001-03-01), Hollman
patent: 6265889 (2001-07-01), Tomita et al.
patent: 6281701 (2001-08-01), Yang et al.
patent: 6288561 (2001-09-01), Leedy
patent: 6297656 (2001-10-01), Kobayashi et al.
patent: 6320568 (2001-11-01), Zavracky
patent: 6337722 (2002-01-01), Ha et al.
patent: 6337772 (2002-01-01), Uehara et al.
patent: 6340963 (2002-01-01), Anno et al.
patent: 6343369 (2002-01-01), Saunders et al.
patent: 6362013 (2002-03-01), Yoshimura et al.
patent: 6380729 (2002-04-01), Smith
patent: 6435868 (2002-08-01), White et al.
patent: 6501289 (2002-12-01), Takekoshi et al.
patent: 6559454 (2003-05-01), Murrell et al.
patent: 6566897 (2003-05-01), Lo et al.
patent: 6570553 (2003-05-01), Hashimoto et al.
patent: 6730906 (2004-05-01), Brunner et al.
patent: 6765203 (2004-07-01), Abel
patent: 6777675 (2004-08-01), Parker et al.
patent: 6828587 (2004-12-01), Yamazaki et al.
patent: 6833717 (2004-12-01), Kurita et al.
patent: 6873175 (2005-03-01), Toro-Lira et al.
patent: 6992290 (2006-01-01), Watanabe et al.
patent: 6995576 (2006-02-01), Imai et al.
patent: 7005641 (2006-02-01), Nakasuji et al.
patent: 7046025 (2006-05-01), Schneidewind et al.
patent: 7077019 (2006-07-01), Weiss et al.
patent: 7084970 (2006-08-01), Weiss et al.
patent: 7088117 (2006-08-01), Uher et al.
patent: 7137309 (2006-11-01), Weiss et al.
patent: 7180084 (2007-02-01), Weiss et al.
patent: 7319335 (2008-01-01), Brunner et al.
patent: 7330021 (2008-02-01), Kurita et al.
patent: 7355418 (2008-04-01), Brunner et al.
patent: 7538857 (2009-05-01), Jacobs et al.
patent: 2001/0052788 (2001-12-01), Tomita
patent: 2002/0024023 (2002-02-01), Brunner et al.
patent: 2002/0034886 (2002-03-01), Kurita et al.
patent: 2002/0047838 (2002-04-01), Aoki et al.
patent: 2003/0209323 (2003-11-01), Yokogaki
patent: 2003/0218456 (2003-11-01), Brunner et al.
patent: 2004/0145383 (2004-07-01), Brunner
patent: 2005/0040338 (2005-02-01), Weiss et al.
patent: 2006/0038554 (2006-02-01), Kurita et al.
patent: 3636316 (1987-04-01), None
patent: 19832297 (1999-01-01), None
patent: 0204855 (1986-12-01), None
patent: 0370276 (1990-05-01), None
patent: 0402499 (1990-12-01), None
patent: 0523584 (1993-01-01), None
patent: 0523594 (1993-01-01), None
patent: 0537505 (1993-04-01), None
patent: 0542094 (1993-05-01), None
patent: 0614090 (1994-09-01), None
patent: 0762137 (1997-03-01), None
patent: 0806700 (1997-11-01), None
patent: 0932182 (1999-07-01), None
patent: 0999573 (2000-05-01), None
patent: 1045425 (2000-10-01), None
patent: 1045426 (2000-10-01), None
patent: 1233274 (2002-08-01), None
patent: 60039748 (1985-03-01), None
patent: 6388741 (1988-04-01), None
patent: 6388742 (1988-04-01), None
patent: 63166132 (1988-07-01), None
patent: 63318054 (1988-12-01), None
patent: 1213944 (1989-08-01), None
patent: 1307148 (1989-12-01), None
patent: 6167538 (1994-06-01), None
patent: 7302563 (1995-11-01), None
patent: 8173418 (1996-07-01), None
patent: 8289231 (1996-11-01), None
patent: 11264940 (1999-09-01), None
patent: 2000180392 (2000-06-01), None
patent: 2000223057 (2000-08-01), None
patent: 2000268764 (2000-09-01), None
patent: 2001033408 (2001-02-01), None
patent: 2001318116 (2001-11-01), None
patent: 2001358189 (2001-12-01), None
patent: 2002039976 (2002-02-01), None
patent: 2002048740 (2002-02-01), None
patent: 2002257997 (2002-09-01), None
patent: 2002310959 (2002-10-01), None
patent: 2002343294 (2002-11-01), None
patent: 2004014402 (2004-01-01), None
patent: 459140 (2001-10-01), None
patent: WO-9209900 (1992-06-01), None
patent: WO-9831050 (1998-07-01), None
patent: WO-9923684 (1999-05-01), None
patent: WO-9960614 (1999-11-01), None
patent: WO-0233745 (2002-04-01), None
patent: WO-0245137 (2002-06-01), None
Brunner, et al., “Development of Puma 5500/10K Platform”, AKTNews, vol. 5, Jan. 2001, p. 13-14.
Brunner, M., “TFT Array Testing: Replacing Mechanics by Electron Beam Deflection,” AKTNews vol. 6, Apr. 2001, p. 15-17.
European Search Report for EP 03 026 267.9, dated Apr. 5, 2004.
German Examination Report for DE 10253717.8, dated Jul. 14, 2003.
German Search Report for DE 10253717.8, dated Jul. 18, 2003.
International Search Report for PCT/US05/26866, dated Aug. 30, 2006.
Invitation to Pay Additional Fees dated Oct. 21, 2003 for corresponding PCT application, PCT/US03/15903.
Invitation to Pay Additional Fees for PCT/US04/043202 dated May 11, 2005.
PCT English Translation of International Preliminary Exam Report for PCT/EP03/06481, dated Mar. 10, 2005.
PCT International Search Report & Written Opinion for PCT/US2004/043202, dated Jul. 28, 2005.
PCT International Search Report for PCT/US03/15903,

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integrated substrate transfer module does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated substrate transfer module, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated substrate transfer module will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2740585

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.