Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2007-02-09
2010-02-16
Blum, David S (Department: 2813)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S414000, C257S533000, C257SE27025, C257SE29324, C257SE31113
Reexamination Certificate
active
07663196
ABSTRACT:
A device20includes substrates22and24coupled to form a volume32between the substrates. A surface28of the substrate22faces a surface30of the substrate24. A metal-insulator-metal capacitor34is formed on one of the surfaces28and30. A conductive element58spans between a top electrode56of the capacitor34and the other surface28and30. Vias64and66extend through the substrate22and are electrically interconnected with the conductive element58and a bottom electrode52of the capacitor34. Another device72includes an underpass transmission line92formed on a surface80of a substrate74within a volume84formed between the substrate74and another substrate76. The line92underlies an integrated device96formed on a surface78of the substrate74.
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Liu Lianjun
Miller Melvy F.
Blum David S
Freescale Semiconductor Inc.
Meschkow & Gresham PLC
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