Integrated optical precision measuring device

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356354, 250237G, 385 14, G01B 902

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active

051277336

ABSTRACT:
A photoelectric measuring device for measuring the relative position between two objects utilizing interfering lightwave patterns is provided. Two diffraction gratings having an equal grid constants are provided to perpendicularly impinge beam bundles into circular coupling-in gratings of the integrated optical circuit. In addition, an integrated light source may be coupled-out of the integrated optical circuit.

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"Theory of Prism-Film Coupler and Thin-Film Light Guides", J. Optical Soc. of America, vol. 60, (1970), pp. 1325-1337, Tien et al.

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