Integrated OPC verification tool

Details Integrated OPC verification tool Integrated OPC verification tool

2005-08-22

2008-08-12

Chiang, Jack (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C716S030000, C716S030000, C716S030000

Reexamination Certificate

active

07412676

ABSTRACT:
An integrated verification and manufacturability tool provides more efficient verification of integrated device designs than verification using several different verification components. The integrated verification and manufacturability includes a hierarchical database to store shared design data accessed by multiple verification components (e.g., layout versus schematic, design rule check, optical process correction, phase shift mask assignment and OPC verification and machine language conversion). The hierarchical database includes representations of one or more additional, or intermediate layer structures that are created and used by the verification components for operations performed on the design being verified. Use of a single hierarchical database having shared data for access and use by multiple verification components streamlines the verification process, which provides an improved verification tool.

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