Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate
2011-03-15
2011-03-15
Dunn, Drew A (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system in a specific environment
Mechanical measurement system
Reexamination Certificate
active
07908096
ABSTRACT:
An integrated mass flow sensor is manufactured by a process of carrying out a micro-machining process on an N or P-type silicon substrate with orientation <100>. This mass flow sensor comprises an upstream thin-film heater, an downstream thin-film heater, and a pair of thin-film heat sensing elements, and a thermally isolated membrane for supporting the heaters and the sensors out of contact with the substrate base. This mass flow sensor is operated with three sets of circuits, a first circuit for measuring a flow rate in a first range of flow rates, a second circuit for measuring a flow rate in a second range of flow rates, and a third circuit in a differential configuration for measuring a flow rate in said first range of flow rates or said second range of flow rates, to significantly increase range of flow rate measurements and provide an optional for concentration measurement, while maintains a high degree of measurement accuracy.
REFERENCES:
patent: 6752014 (2004-06-01), Kanke et al.
patent: 2004/0211253 (2004-10-01), Horie et al.
patent: 2005/0100260 (2005-05-01), Yamazaki et al.
Chen Chih-Chang
Huang Liji
Wang Gaofeng
Yao Yahong
Dunn Drew A
Siargo Ltd.
Sun Xiuquin
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