4. Data processing: measuring, calibrating, or testing
  5. Measurement system in a specific environment
  6. Mechanical measurement system

Yahong Yao

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Defined sacrifical region via ion implantation for...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Fabry-Perot cavity manufactured with bulk micro-machining...

Optical: systems and elements – Optical modulator – Light wave temporal modulation
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Integrated micromachined thermal mass flow sensor and...

Data processing: measuring – calibrating – or testing – Measurement system in a specific environment – Mechanical measurement system
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2260025

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