Integrated MEMS resonator device

Details Integrated MEMS resonator device Integrated MEMS resonator device

2011-01-11

2011-01-11

Fulk, Steven J (Department: 2891)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Physical deformation

C438S050000, C257SE27112

Reexamination Certificate

active

07868403

ABSTRACT:
The present invention provides a method for manufacturing a micro-electro-mechanical system (MEMS) resonator device using the same device layer, dielectric layer, and conductive layer that is used to create other electrical devices in a complementary metal oxide semiconductor (CMOS) process.

REFERENCES:
patent: 6531331 (2003-03-01), Bennett et al.
patent: 6876056 (2005-04-01), Tilmans et al.
patent: 6960488 (2005-11-01), Brosnihan et al.
patent: 2003/0042561 (2003-03-01), Funaki
patent: 2004/0245586 (2004-12-01), Partridge et al.

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