Data processing: measuring – calibrating – or testing – Testing system – Of mechanical system
Reexamination Certificate
2000-09-14
2002-12-03
Shah, Kamini (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
Of mechanical system
C702S117000, C324S750010, C118S7230IR
Reexamination Certificate
active
06490536
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates to plasma devices. More particularly, the present invention relates to an improved plasma processing device.
Plasma processing devices may be used in manufacturing. Plasma processing devices may use power systems to generate and sustain a plasma.
To facilitate discussion,
FIG. 1
is a schematic view of a prior plasma processing device
10
, comprising a plasma process unit
12
, a pump manifold
14
supporting the plasma process unit
12
, a lower transfer chamber
16
supporting the pump manifold
14
, and a power source
18
connected to the lower transfer chamber
16
. The plasma process unit
12
, pump manifold
14
, and lower transfer chamber
16
collectively form a plasma process module. The plasma process unit
12
, comprises an upper electrode
20
spaced apart from a lower electrode
22
. A lead
24
extends from the lower electrode
22
, through the pump manifold
14
and the lower transfer chamber
16
to provide an electrical connection between the lower electrode
22
and the power source
18
. An example of a power source
18
is a One Box™ radio frequency (rf) power source, which comprises a first generator
28
, a second generator
30
, and a match box
32
electrically connected to the first generator
28
and the second generator
30
. In this example, the first generator
28
provides a 2 MHz output and the second generator
30
provides a 27 MHz output. The match box
32
may provide electrical diagnostics and impedance matching. An output connector
34
extends from the match box
32
. The lead
24
is electrically connected to the output connector
34
, which may be a 5 inch diameter piece of silver coated copper plug and where the lead may be connected to the output connector
34
by a screw or bolt. Nut and bolt sets
36
may provide a mechanical connection to connect the power source
18
to the lower transfer chamber
16
. A bottom cover
38
covers the bottom of the lower transfer chamber
16
. An interlock switch
40
is placed near the cover
38
and is electrically connected to the first generator
28
and the second generator
30
, so that when the cover is removed from the lower transfer chamber
16
the interlock switch
40
causes the first generator
28
and the second generator
30
to be powered down to reduce electrical shock hazards.
In the testing of the power source
18
in the prior art, to facilitate discussion,
FIG. 2
is a schematic view of a power source
18
of a plasma processing device being tested and
FIG. 3
is a flow chart of the testing procedure of the power source
18
.
In the testing of the power source
18
, a power source problem may be suspected (step
304
). The first and second generators
28
,
30
may be turned off and powered down (step
308
). The power source
18
may be disconnected from the plasma process module (step
312
), which might take 15 to 30 minutes. To do this, the bottom cover
38
may be removed from the lower transfer chamber
16
to provide access to nut and bolt sets
36
. The removal of the bottom cover
38
may trigger the interlock switch
40
, which may shut down the generators
28
,
30
if they are not already turned off. The nut and bolt sets
36
may be removed. Typically a power source
18
may be connected by 6 to 7 nut and bolt sets
36
. In addition, the lead
24
may be disconnected from the output connector
34
. The power source
18
may be moved away from the plasma process module (step
316
) to create enough space to connect the load simulator
44
, which might take 5-45 minutes. A load simulator
44
connected to a 50 ohm terminator
46
may be connected to the output connector
34
of the power source
18
(step
320
). The generators
28
,
30
may be turned on and powered up (step
324
) which may take 10 minutes, to determine if there are any problems with the power source
18
(step
328
). Diagnostic instruments within the first and second generators
28
,
30
or within the match box
32
may be able to determine if the power source
18
is working properly, when connected to the load simulator
44
.
If it is determined that the power source
18
is working correctly, then to reconnect the power source, the first and second generators
28
,
30
may be powered off (step
332
). The power source
18
may then be disconnected from the load simulator
44
and the power terminator
46
(step
336
). The power source
18
may then be moved to the plasma process module (step
340
). The lead
24
may be connected to the output connector
34
. The power source
18
may then be connected to the lower transfer chamber
16
of the plasma process module (step
344
). The 6 to 7 nut and bolt sets
36
may be used to complete the connection. The bottom cover
38
may be placed on the lower transfer chamber
16
to set the interlock switch
40
so that it is not triggered. The first and second generators
28
,
30
may the be powered on (step
348
).
The connecting and disconnecting of the power source
18
and the powering up and powering down of the generators may be time consuming and hazardous and may require a high level of expertise to be done correctly. In addition, the connecting and disconnecting of the output connector
34
and the lead
24
may cause the connection between the output connector
34
and the lead
24
to be less reliable. The many steps involved increase the chance of mistakes with high voltage and current devices.
In view of the foregoing, it is desirable to provide a simple method and apparatus for testing a power source of a plasma process device.
SUMMARY OF THE INVENTION
The invention relates, in one embodiment, to a plasma processing apparatus, comprising: a plasma process module; an electrode within the plasma process module; a switch electrically connected to the electrode; a load simulator electrically connected to the switch; a power source electrically connected to the switch, wherein the switch is electrically connected between the power source and the load simulator.
The invention relates, in a second embodiment, to a method for testing a generator in a plasma processing device while the generator is running, comprising the steps of: setting the generator to provide a near minimum (which is low or zero) power output, while the generator remains on; through a switch electrically connected to the generator, connecting a load simulator to the generator; increasing the output of the generator; and determining if the generator is providing sufficient power.
REFERENCES:
patent: 5016565 (1991-05-01), Saitoh et al.
Ellingboe Albert R.
Morel Bruno
Beyer Weaver & Thomas LLP
Lam Research Corporation
Shah Kamini
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