Integrated complex nano probe card and method of making same

Details Integrated complex nano probe card and method of making same Integrated complex nano probe card and method of making same

2008-07-15

2008-07-15

Patel, Paresh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

10393262

ABSTRACT:
An integrated complex nano probe card is disclosed to include a substrate layer having a front side and a back side, and complex probe pins arranged in the substrate layer. Each complex probe pin has a bundle of aligned parallel nanotubes
anorods and a bonding material bonded to the bundle of aligned parallel nanotubes
anorods and filled in gaps in the nanotubes
anorods. Each complex probe pin has a base end exposed on the back side of the substrate layer and a distal end spaced above the front side of the substrate layer.

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