Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Including integrally formed optical element
Patent
1998-02-26
2000-11-21
Chaudhuri, Olik
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Including integrally formed optical element
438 65, 438107, 438456, H01L 2100
Patent
active
061501883
ABSTRACT:
An integrated circuit with a number of optical fibers that are formed in high aspect ratio holes. The high aspect ratio holes extend through a semiconductor wafer. The optical fibers include a cladding layer and a core formed in the high aspect ratio hole. These optical fibers are used to transmit signals between functional circuits on the semiconductor wafer and functional circuits on the back of the wafer or beneath the wafer.
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Ahn Kie Y.
Forbes Leonard
Geusic Joseph E.
Chaudhuri Olik
Eaton Kurt
Micro)n Technology, Inc.
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