Integrated circuit with an air bridge having a lid

Details Integrated circuit with an air bridge having a lid Integrated circuit with an air bridge having a lid

1996-05-20

1998-10-20

Thomas, Tom

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Flip chip

257777, 257226, 257276, 257277, 257704, 257622, 257787, H01L 2904, H01L 2348, H01L 2980

Patent

active

058250921

ABSTRACT:
An air bridge structure 102 is formed in a cavity of a glass lid substrate. The air bridge structure is bonded to an integrated circuit in a device substrate 82 to provide an air bridge structure coupled to the integrated circuit.

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patent: 4807021 (1989-02-01), Okumura
patent: 5122856 (1992-06-01), Komiya
patent: 5198963 (1993-03-01), Gupta et al.
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patent: 5319237 (1994-06-01), Legros
patent: 5483092 (1996-01-01), Kosaki
patent: 5497013 (1996-03-01), Temple
patent: 5506451 (1996-04-01), Hyugaji
patent: 5604383 (1997-02-01), Matsuzaki
patent: 5614743 (1997-03-01), Mochizuki

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