Integrated circuit system with assist feature

Details Integrated circuit system with assist feature Integrated circuit system with assist feature

2007-10-22

2010-11-16

Kik, Phallaka (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000, C700S120000, C700S121000, C326S047000, C326S101000, C257S773000, C438S129000

Reexamination Certificate

active

07836420

ABSTRACT:
An integrated circuit system comprising: providing a substrate; forming a main feature using a first non-cross-junction assist feature over the substrate; forming the main feature using a second non-cross-junction assist feature, adjacent a location of the first non-cross-junction feature, over the substrate; and forming an integrated circuit having the substrate with the main feature thereover.

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patent: 7538438 (2009-05-01), Yu et al.
patent: 2002/0061608 (2002-05-01), Kuroda et al.
patent: 2006/0248495 (2006-11-01), Sezginer
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patent: 2006/0248499 (2006-11-01), Sezginer et al.
patent: 2006/0278875 (2006-12-01), Ohnuma et al.
patent: 2007/0004097 (2007-01-01), Yu et al.

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