Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1984-09-11
1986-03-18
Kittle, John E.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430314, 430315, 430316, 430317, 430318, 430329, 427 96, G03C 500
Patent
active
045769001
ABSTRACT:
A process for forming on a substructure a plural layer, conductor interconnect pattern consisting of a plurality of successively formed, substantially planar, composite layers of insulating material and conductive material with said insulating material on each layer defining a pattern of regions filled with conductive material to serve as part of a vertical and horizontal interconnect system. The process includes the following steps for forming each composite layer:
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Amdahl Corporation
Dees Jos,e G.
Kittle John E.
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