Integrated circuit memory cells and methods of forming

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257S301000, C257S302000, C257S306000, C257S334000, C257S401000, C257S773000

Reexamination Certificate

active

07453112

ABSTRACT:
An integrated circuit memory cell includes a combined first capacitor electrode and first transistor source/drain, a second capacitor electrode, a capacitor dielectric between the first and second electrodes, and a vertical transistor above and including the first source/drain. The second source/drain may be included in a digit line inner conductor connecting a digit line to a transistor channel of the vertical transistor. The channel may include a semiconductive upward extension of the combined first electrode and first source/drain. The memory cell may be included in an array of a plurality of such memory cells wherein the second electrode is a common electrode among the plurality. The memory cell may provide a straight-line conductive path between the first electrode and a digit line, the path extending through the vertical transistor.

REFERENCES:
patent: 3731287 (1973-05-01), Seely et al.
patent: 4673962 (1987-06-01), Chatterjee et al.
patent: 4829017 (1989-05-01), Malhi
patent: 4864375 (1989-09-01), Teng et al.
patent: 4873560 (1989-10-01), Sunami
patent: 4937641 (1990-06-01), Sunami et al.
patent: 4990980 (1991-02-01), Wada
patent: 5001078 (1991-03-01), Wada
patent: 5001526 (1991-03-01), Gotou
patent: 5006909 (1991-04-01), Kosa
patent: 5072269 (1991-12-01), Hieda
patent: 5102817 (1992-04-01), Chatterjee et al.
patent: 5103276 (1992-04-01), Shen et al.
patent: 5155059 (1992-10-01), Hieda
patent: 5164917 (1992-11-01), Shichijo
patent: 5208657 (1993-05-01), Chatterjee et al.
patent: 5225697 (1993-07-01), Malhi et al.
patent: 5250830 (1993-10-01), Yagishita et al.
patent: 5252845 (1993-10-01), Kim et al.
patent: 5291438 (1994-03-01), Witek et al.
patent: 5300450 (1994-04-01), Shen et al.
patent: 5334548 (1994-08-01), Shen et al.
patent: 5350708 (1994-09-01), Yagishita et al.
patent: 5357132 (1994-10-01), Turner
patent: 5414288 (1995-05-01), Fitch et al.
patent: 5504028 (1996-04-01), Wada et al.
patent: 5561308 (1996-10-01), Kumata et al.
patent: 5888864 (1999-03-01), Koh et al.
patent: 5939760 (1999-08-01), Batra et al.
patent: 6060723 (2000-05-01), Nakazato
patent: 6204115 (2001-03-01), Cho
patent: 6222218 (2001-04-01), Jammy et al.
patent: 6246083 (2001-06-01), Noble
patent: 6265742 (2001-07-01), Gruening
patent: 6300199 (2001-10-01), Reinberg
patent: 6373091 (2002-04-01), Horak et al.
patent: 6426252 (2002-07-01), Radens et al.
patent: 6506638 (2003-01-01), Yu
patent: 6518615 (2003-02-01), Geusic et al.
patent: 6521935 (2003-02-01), Krautschneider et al.
patent: 6528837 (2003-03-01), Forbes et al.
patent: 6531727 (2003-03-01), Forbes et al.
patent: 6537871 (2003-03-01), Forbes et al.
patent: 6635526 (2003-10-01), Malik
patent: 6798009 (2004-09-01), Forbes
patent: 2001/0048624 (2001-12-01), Morimoto
patent: 2002/0127803 (2002-09-01), Schlosser et al.
patent: 2003/0048656 (2003-03-01), Forbes
patent: 2004/0000690 (2004-01-01), Kujirai et al.
patent: 2005/0106821 (2005-05-01), Snyder et al.
patent: 3801525 (1988-09-01), None
patent: 0 333 426 (1989-09-01), None
patent: 0 445 008 (1991-09-01), None
patent: 0 445 008 (1991-09-01), None
patent: 60-152056 (1985-10-01), None
patent: 62-200759 (1987-09-01), None
patent: 02-083968 (1990-03-01), None
patent: 02284465 (1990-11-01), None
patent: 05-110019 (1993-04-01), None
patent: 2004-158585 (2004-06-01), None
patent: WO 97/44826 (1997-11-01), None
patent: WO2005/010934 (2005-03-01), None
Gudyma, Yu, et al, Calculation of the Heat Mode of the Switching Powerful D-MOS Transistor Having a Vertical Structure, Radioelectronics and Communication Systems, vol. 40, No. 5, pp. 47-48, 1997.
K.W. Guarini, et al, Process Integration of Self-Assembled Power Templates Into Silicon Nanofabrication, J. Vac. Sci. Technol., vol. 20, No. 6, pp. 2788-2792, 2002.
Kunz, V.D., et al, Reduction of Parasitic Capacitance in Vertical MOSFETs by Spacer Local Oxidation, IEEE Transactions on Electron Devices, vol. 50, Issue 6, pp. 1487-1493, Jun. 2003.
Wuensche, S., et al, A 110 nm 512 Mb DDR DRAM with Vertical Transistor Trench Cell, Symposium on VSLI Circuits Digest of Technical Papers 2002, pp. 114-115, 2002.
Hyun-Jin, Cho, et al, A Novel Pillar DRAM Cell for 4 Gbit and Beyond, 1998 Symposium on VLSI Technology, Digest of Technical Papers, pp. 38-39, Jun. 9-11, 1998.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Integrated circuit memory cells and methods of forming does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Integrated circuit memory cells and methods of forming, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Integrated circuit memory cells and methods of forming will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4037187

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.