Integrated circuit logic with self compensating shapes

Details Integrated circuit logic with self compensating shapes Integrated circuit logic with self compensating shapes

2007-11-27

2007-11-27

Pham, Hoai (Department: 2814)

Computer-aided design and analysis of circuits and semiconductor

Nanotechnology related integrated circuit design

C716S030000

Reexamination Certificate

active

11097552

ABSTRACT:
An integrated circuit (IC) including at least one combinational logic path. The features in the combinational logic path are self compensating for out-of-focus effects. In particular, field effect transistor (FET) gates may be iso-focally spaced such that the gate (critical dimension) may move with changing focus, but the gate length remains the same. Alternately, logic circuits in a path may self-compensate for focus effects on individual circuits.

REFERENCES:
patent: 6871338 (2005-03-01), Yamauchi

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