Stock material or miscellaneous articles – Composite – Of fluorinated addition polymer from unsaturated monomers
Patent
1997-11-06
2000-02-29
Jones, Deborah
Stock material or miscellaneous articles
Composite
Of fluorinated addition polymer from unsaturated monomers
428461, 428901, 174258, 361751, 528 10, B32B 2700
Patent
active
060307064
ABSTRACT:
A intermetal level dielectrics with copolymers of parylene and cyclic siloxances (432, 482) between metal lines plus oxides (450, 490), and vapor deposition method for the copolymerization. Fluorination of the copolymers lowers dielectric constant and increases working temperature.
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Eissa Mona
Gaynor Justin
Brady W. James
Donaldson Richard L.
Hoel Carlton H.
Jones Deborah
Lam Cathy F.
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