Integrated circuit device having a gas-phase deposited...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...

Reexamination Certificate

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C438S106000

Reexamination Certificate

active

07662726

ABSTRACT:
An integrated circuit device includes a semiconductor device having an integrated circuit. A gas-phase deposited insulation layer is disposed on the semiconductor device, and a conducting line is disposed over the gas-phase deposited insulation layer.

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patent: 0528540 (1992-07-01), None
Quirk, Semiconductor Manufacturing Technology, 2001, Pearson Hall, pp. 260-279.
McGraw-Hill Dictionary of Scientific and Technical Terms, 1994, p. 339.

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