Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of...
Reexamination Certificate
2007-09-13
2010-02-16
Dickey, Thomas L (Department: 2893)
Semiconductor device manufacturing: process
Coating of substrate containing semiconductor region or of...
C438S106000
Reexamination Certificate
active
07662726
ABSTRACT:
An integrated circuit device includes a semiconductor device having an integrated circuit. A gas-phase deposited insulation layer is disposed on the semiconductor device, and a conducting line is disposed over the gas-phase deposited insulation layer.
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Ewe Henrik
Mahler Joachim
Mengel Manfred
Dicke Billig & Czaja, PLLC
Dickey Thomas L
Infineon - Technologies AG
Yushin Nikolay
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